Wafer/Die Handling Tools

Fluoro Mechanic    Products
Withstands up to 130C continuously For 4, 5, 6, 8 and 12-inch wafer handling No glue or metal parts PEEK, PPS and Conductive PEEK materials available 
Our products include Fluoro Mechanic vacuum wands (vacuum pencils), manual wands (PEEK wafer tweezers), vacuum pumps, tubing, etc. ESD safe products and tweezers for 300mm wafer handling are also available. Thank you for taking your time to visit our wafer handling site. 
Withstands up to 288C continuously 
For 6 and 8-inch wafer handling 
Vespel(R) is firmly glued to SUS (Stainless Steel). 
Oil Free Diaphragm Vacuum Pumps with Built-in HEPA filters
Built-in inlet and outlet HEPA filters
Oil-free for cleanroom use 
Long term and high reliability 
Designed to minimize noise generation 
Nylon body for static protection 
Compact design 
ESD Safe Tubing (Accessory) 
Static-Dissipative Grounding Kit (Accessory) 
HEPA Filter Kit (Replacement Part) 
Compliance with CE regulations 
Model:        FV-30-110        FV-60-110 
Flow Rate:     2.5 l/min (0.088 cfm)     2.5 l/min (0.088 cfm) 
Ultimate Pressure: -300 mmHg (-40 kPa)     -600 mmHg (-80 kPa) 
Power Requirement:       100-120 VAC 100-120 VAC 
Consumption Power:       5.0 W   10.0 W 
Dimensions(D x W x H): 137 x 88 x 85 mm 137 x 88 x 133 mm 
Weight:  800 g   1250 g 
Duty Cycle:    Continuous   Continuous 
Life Expectancy:    > 8760 hours  > 8760 hours 
Wafer Size:   Up to 6-inch     8 and 12-inch 
  • Our unique valve desing ensures reliable suction and easy release of the semiconductor wafer. 
  • The well polished inner walls of the valve parts minimizes particle generation. 
  • The optically polished wafer tip provides excellent adhesion to a wafer. 
  • The wand body can be easily detached from the tubing. 

Vacuum Wands for Semiconductor Wafer Processing
Vacuum Wand / Vacuum Pump
Reliable suction of an object by our unique valve.
A large selection of interchangeable attachments 
Valve Type: 
  • Normally Closed 
  • Normally Open 
  • Normally Open with Switch 
  • Normally Open with Blow DuoVac 
Body Material: 
  • Conductive Nylon (black) 
  • Teflon(R) (white) 
Length: approx.185mm 
Wand Stand 
Replacement Parts 
  • Designed to minimise noise generation 
  • Adjustable Vacuum Pressure: -4kPa to -14kPa 
  • Flow Rate: 2.7 l/min 
  • Power Requirement: 100-120 VAC 
  • Consumption Power: 5.0 W 
  • Duty Cycle: Continuous 
  • Life Expectancy > 8760 hours 
  • Dimensions (D x W x H): 155 x 72 x 54 mm 
  • Weight: 600 g 
  • 240VAC version (FV-10-240) available 
  • Static-Dissipative Grounding Kit (Accessory) 
  • ESD Safe Tubing (Accessory) 
  • Inlet Filter (Accessory) 
Vacuum Wand
  • Built-in inlet and outlet HEPA filters
  • Nylon body for static protection 
  • Suction Power: -30kPa (fixed) 
  • Adjustable Blowing Power: 0-10kPa 
  • Flow Rate: 1.2 l/min 
  • Power Requirement: 100-120 VAC 
  • Consumption Power: 5.0 W 
  • Duty Cycle: Continuous 
  • Life Expectancy > 8760 hours 
  • Dimensions (D x W x H): 137 x 88 x 85 mm 
  • Weight: 850 g 
  • 240VAC version (FV-W-240) available 
  • PVC Double Tubing (Does not come with the pump) 
  • HEPA Filter Kit (Replacement Part)
Push the button to pick up the object 
Push the button to release the object 
Manual Wands
A Family of Technology Solutions
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Ohana Technology 
P.O. Box 2497 Grass Valley, CA 95945
Email: sales@ohana-technology.com  
Phone: 530.559.3345
Ohana Technology P.O. Box 2497 Grass Valley, CA 95945
Email: sales@ohana-technology.com Phone: 530.559.3345